Possible response to centralized management systems through digitalization. [ULVAC]
This is a turbo molecular pump with a composite wing design that employs digital 5-axis controlled magnetic bearings. The UTM-FH and UTM-FW achieve advantages such as high functionality, high reliability, and energy-saving capabilities due to the adoption of digital 5-axis controlled magnetic bearings. The FH series is designed for light to middle processes with high back pressure and high compression ratios, while the FW series is suitable for wide-range, high-flow applications for high-load processes and middle to hard processes. 【Features】 ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized management systems through digitalization. ○ Incorporates a coupling-free system, allowing operation in combination with registered pump bodies using a single power supply by switching models. ○ Features a speed variable system, allowing exhaust speed to be adjusted within a range of 25% to 100%. ○ With excellent corrosion-resistant surface treatment, special surface treatment and internal heating systems are available as options for more demanding processes (FW series). ○ Adopts a destructive energy absorption structure, designed for high safety by minimizing equipment damage during malfunctions. For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Features】 ○ A wide range from 350L/s to the world's largest (digital magnetic bearing type) 6300L/s ○ Maintains stable exhaust characteristics against changes in back pressure (FH series) ○ Options available such as an internal heating system that manages rotor temperature and reduces the adhesion of by-products (FW series) ○ Excellent corrosion-resistant surface treatment (excluding 3303FH and 6300FH) → Special surface treatments (Ni plating + cationic electrodeposition coating, special laminated coatings, anodizing, etc.) are also available as options if needed ○ Can be mounted in all directions ○ Equipped with a speed variable system, allowing pump rotation speed to be varied from 25% to 100% ○ With the coupling-free system and tuning-free system, combinations of power supply and pump body or changes in cable length are flexible ○ By adopting a battery-free system, the backup power during a power outage uses self-generated energy from regenerative energy (no battery replacement needed) ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized monitoring systems ● For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
【Applications】 [UTM-FH Series] ○ Main exhaust for light to middle processes without by-products from reactions in deposition devices, sputtering devices, dry etching devices, etc. ○ Main exhaust systems for analytical devices, research and development devices, experimental devices, etc. ○ Main exhaust systems for light gases such as H2 and He in the above exhaust systems. ○ Applications using multiple TMPs with centralized exhaust for backing pumps. [UTM-FW Series] ○ Main exhaust systems for middle to hard processes in dry etching devices, CVD devices, etc. ○ High flow gas exhaust applications for dry etching devices, CVD devices, sputtering devices, etc. ○ Main exhaust systems for analytical devices, research and development devices, experimental devices, etc. ● For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
