The pressure standard corresponds to gauge pressure, allowing for accurate measurement of atmospheric pressure【ULVAC】.
The G-TRAN series SAU pressure sensor unit is a pressure sensor unit that employs a semiconductor thin-film element capable of accurately measuring near atmospheric pressure (gauge pressure: -100 kPa to 10 kPa). It is also capable of continuous operation under high vacuum conditions, and the material of the inner surface is made of corrosion-resistant SUS316L. 【Specifications】 ○ Pressure reference: Gauge pressure ○ Measurement pressure range: -100 to 10 kPa (gauge pressure) ○ Measurement accuracy: ±3% F.S. ○ Temperature characteristics: ZERO ±0.2% F.S./℃ SPAN ±0.1% F.S./℃ ○ Repeatability: ±2% F.S. For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Ideal for checking atmospheric pressure → The pressure reference is compatible with gauge pressure, allowing for accurate measurement of atmospheric pressure. ○ Supports continuous use in high vacuum → Utilizes semiconductor thin film elements (SUS317L) to accommodate continuous use in high vacuum. ○ Measurement value output signal → Pressure is equipped with a standard DC 0–6V log output. ○ Power supply → Compatible with a wide range of DC 12–25V. ○ Quick coupling compatible → The connection port adopts NW17. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ For confirming atmospheric pressure in various high vacuum devices, including solar cells, FPDs, semiconductors, and electronic components. ○ For confirming atmospheric pressure in various industrial vacuum devices, including vacuum furnaces. ○ Gauge pressure: -100 kPa to 10 kPa (Absolute pressure: 10^4 to 10^5 Pa) for vacuum devices that require accurate measurement of the atmosphere. ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.