High-speed spectroscopic ellipsometer UNECS series

It is a spectroscopic ellipsometer that measures the film thickness and refractive index of thin films with high speed and high precision. [ULVAC]

The UNECS series is a spectroscopic ellipsometer that measures film thickness and refractive index with high speed and high precision. It employs a unique measurement method that achieves fast measurements and compact design. We offer a wide range of models to suit various applications, including a unique portable type, automatic stage types, and built-in types compatible with vacuum environments. 【Specifications】 ○ High-speed measurement → Achieves high-speed measurements as fast as 20ms by adopting a unique snapshot method. ○ Visible spectroscopy compatible → The wavelength range can be selected from standard type (530nm to 750nm) and visible spectroscopy type (380nm to 760nm). ○ Compact sensor unit → The light receiving and emitting sensors are composed solely of optical elements without rotating mechanisms, making them very lightweight and compact, with no need for regular maintenance. ○ Rich lineup → In addition to the unique portable type, we offer a variety of models to accommodate diverse applications, including manual/automatic stage types, large substrate types, and built-in types compatible with atmospheric/vacuum environments. For more details, please contact us or download the catalog.

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