It is a spectroscopic ellipsometer that measures the film thickness and refractive index of thin films with high speed and high precision. [ULVAC]
The UNECS series is a spectroscopic ellipsometer that measures film thickness and refractive index with high speed and high precision. It employs a unique measurement method that achieves fast measurements and compact design. We offer a wide range of models to suit various applications, including a unique portable type, automatic stage types, and built-in types compatible with vacuum environments. 【Specifications】 ○ High-speed measurement → Achieves high-speed measurements as fast as 20ms by adopting a unique snapshot method. ○ Visible spectroscopy compatible → The wavelength range can be selected from standard type (530nm to 750nm) and visible spectroscopy type (380nm to 760nm). ○ Compact sensor unit → The light receiving and emitting sensors are composed solely of optical elements without rotating mechanisms, making them very lightweight and compact, with no need for regular maintenance. ○ Rich lineup → In addition to the unique portable type, we offer a variety of models to accommodate diverse applications, including manual/automatic stage types, large substrate types, and built-in types compatible with atmospheric/vacuum environments. For more details, please contact us or download the catalog.
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【Lineup】 ○U N E C S - Portable → Lightweight and compact portable type ○U N E C S - 1500 M (Manual Stage) → Manual stage type compatible with φ150mm ○U N E C S - 1500 A / 2000 A / 3000 A (Automatic Stage) → Automatic stage type capable of mapping measurements ○U N E C S - 1 M (Built-in) → Built-in type that can be integrated into various devices ● For more details, please contact us or download the catalog.
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ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.