This is a sensor used in the CRTM series of crystal oscillator film deposition controllers. [ULVAC]
The CRTS series is a sensor used for the crystal oscillator-based film deposition controller CRTM series. We offer a wide range of options to be widely used in various deposition devices. The CRTS-M6 is a rotary multi-sensor developed for the crystal oscillator-based film deposition controller CRTM series. It can accommodate six crystals operating at 5MHz or 6MHz, making it suitable for continuous deposition and other applications. 【Product Lineup】 ○ Deposition Sensor CRTS-4 ○ Multi-Sensor CRTS-M6 ○ Multi-Sensor CRTS-12NS For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Features】 [Single Sensor] ○ Selectable based on conditions such as the presence of baking and operating temperature ○ Compact sensor head for easy placement within the device ○ Option to choose long-life type oscillators [Multi Sensor] ○ Capable of mounting 6 or 12 crystals ○ Achieves high reliability through a unique drive system using a vacuum motor ○ Crystal replacement is easy as it can be done by detaching the holder ○ Detects crystal oscillation abnormalities (lifetime) and can automatically switch crystals (when using the CRTM series with the controller) ● For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
【Applications】 ○ Deposition of optical and optical communication components ○ Deposition of organic materials ○ Deposition of electronic components and others ● For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.