It is a DC power supply for sputtering with outputs of 10kW and 20kW. [ULVAC]
The DPG-10 and DPG-20 are DC power supplies for sputtering with outputs of 10kW and 20kW, respectively. They are composed of reliable components and circuits. This power supply is highly reliable and optimized for plasma loads, reflecting the know-how gained from years of experience in power supply applications. 【Specifications】 ○ Input Voltage: AC208V ○ Variation Range: AC187 – 229V ○ Phases, Frequency: 3-phase, 50/60Hz ○ Input Connection: Connector connection ○ Input Capacity: 13.5kVA or less For more details, please contact us or download the catalog.
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basic information
**Features** ○ Lightweight and Space-Saving → Excellent installation with a lightweight and space-saving design ○ Selectable Output Voltage Range → In addition to the 800V specification, a 1000V specification is also available ○ Abundant Arc Handling → Rich arc control methods with extensive knowledge of plasma ○ No Cooling Water Required → No cooling water needed due to forced air cooling system ○ Capable of High-Speed Arc Interruption Circuit → Achieves low arc energy as standard → High-speed arc interruption circuit can be added as an option ○ Capable of Flexible Parallel Operation → DPG-10, DPG-20: With optional parallel operation function, freely combine 10kW and 20kW for parallel operation of up to 12 units (maximum 240kW) ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Sputtering equipment for FPD ○ Sputtering equipment for semiconductors ○ Sputtering equipment for touch panels ○ Sputtering equipment for industrial coating ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.