By incorporating a high-efficiency RF amplifier, we have achieved miniaturization and weight reduction. 【ULVAC】
The RFS-N series is an RF power supply for plasma processes with output options of 13.56MHz, 0.5kW/1kW/3kW/5kW. It achieves compactness and lightweight design by incorporating a high-efficiency RF amplifier. Additionally, it features a built-in auto-matching controller function, allowing for power control and matching system control with just the main unit. 【Product Lineup】 ○RFS-1305N/1310N ○RFS-1330N/1350N ○MBX-1305N/1310N ○MBX-1330N/1350N For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Adoption of high-efficiency amplifier → Configures RF circuit with good power conversion efficiency, saving energy ○ High-speed auto-matching → Implements high-speed auto-matching using a high-speed algorithm ○ Built-in auto-matching function in RF power supply → Matching system control is possible with just the main unit → Manual operation of RF power supply and matching box is also possible with the built-in controller ○ Supports flexible control methods → External analog control and serial communication control are possible ○ High reliability → Feedbacks know-how accumulated as a device manufacturer into the design ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Sputtering equipment ○ CVD equipment ○ Plasma etching equipment ○ RF ion source ○ Neutralizer ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.