Feedback the know-how accumulated as a device manufacturer into the design! This is a power supply for high-reliability film deposition equipment【ULVAC】.
At ULVAC, we offer a lineup of power supplies tailored for film deposition equipment, including the optimal DC power supply for plasma loads, "DPG-10/DPG-20," and the RF power supply "RFS-N Series," which achieves compactness and lightweight design with high-efficiency RF amplifiers. 【Product Lineup】 ■ DC Power Supply "DPG-10/DPG-20" ■ EB Power Supply "HPS-N Series" ■ RF Power Supply "RFS-N Series" For more details, please refer to the catalog or feel free to contact us.
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basic information
【Features】 <DC Power Supply "DPG-10/DPG-20"> ■ Lightweight and space-saving ■ Selectable output voltage range ■ Rich arc handling capabilities ■ No cooling water required ■ Capable of high-speed arc interruption circuit ■ Capable of flexible parallel operation function <EB Power Supply "HPS-N Series"> ■ No cooling water required ■ High reliability ■ Simple operability ■ Sweep waveform variations ■ High-speed arc interruption function ■ Low-level arc control function (optional for optical applications) <RF Power Supply "RFS-N Series"> ■ High-efficiency amplifier adopted ■ High-speed auto-matching ■ Built-in auto-matching function for RF power supply ■ Supports flexible control forms ■ High reliability *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
【Applications】 <DC Power Supply "DPG-10/DPG-20"> ■ Sputtering equipment for FPD ■ Sputtering equipment for semiconductors ■ Sputtering equipment for touch panels ■ Sputtering equipment for industrial coating <EB Power Supply "HPS-N Series"> ■ Vacuum evaporation for metal films ■ Vacuum evaporation for optical films <RF Power Supply "RFS-N Series"> ■ Sputtering equipment ■ CVD equipment ■ Plasma etching equipment ■ RF ion source ■ Neutralizer *For more details, please refer to the catalog or feel free to contact us.
Detailed information
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DC Power Supply DPG-10/DPG-20 The DPG-10 and DPG-20 are DC power supplies for sputtering with outputs of 10kW and 20kW, respectively. They are composed of reliable components and circuits. This power supply, optimized for plasma loads, reflects the know-how gained from years of experience in power supply applications, ensuring high reliability.
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EB Power Supply HPS-N Series The HPS-N series is a power supply compatible with electron beam evaporation sources, designed to stabilize circuits and enhance performance based on Ulvac's years of accumulated technology and achievements. By combining it with the EB Gun Controller EGC-10GS, it can be used for both optical thin film EB guns and metal thin film EB guns.
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RF Power Supply RFS-N Series The RFS-1310N/RFS-1305N is an RF power supply for plasma processes with outputs of 1kW/500W at 13.56MHz. It achieves a compact and lightweight design by incorporating a high-efficiency RF amplifier. Furthermore, it features an auto-matching function built into the RF power supply, allowing for power control and matching system control using only the main unit.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.