Introduction of examples of ultra-thin film technology aimed at achieving dramatic performance improvements in hard disk drives.
To achieve a dramatic improvement in the performance of hard disk drives, the thinning of the slider head protective film has been considered. With the nano-spacing of the head and disk, a harder and more elastic carbon film is required to minimize wear caused by contact between the head and the disk surface, leading to the demand for a dense film with excellent corrosion resistance and no pinholes. The ta-C film produced by the FCVA coating method has been widely adopted in the industry as a carbon film that meets these performance requirements and offers excellent productivity while being particle-free. 【Application Examples】 ○ Conventional DLC films posed practical issues in the thin film region below 4nm. ⇒ The use of ta-C films has enabled the practical application of 1.5nm thin films. ○ In vertical magnetic recording systems, the application of ta-C films as a disk surface protective film is also being considered. ⇒ Challenge: There is a need for faster coating compared to sliders. For more details, please contact us or download the catalog.
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[Hard Disk Slider Case Study] [FS1 on Shimadzu DLC-MR3CA] ○ GMR Slider Head Application ○ Replaceable Cluster Tool ○ Uniformity better than ±5% in a deposition area of up to φ8 inches [Requirements for GMR Head Overcoat] ○ Total Film Thickness (Si/DLC): < 3nm ○ Corrosion Resistance ○ Density and Hardness ○ Wear Resistance ○ Productivity → Deposition Area: 8 inches → Uniformity/Reproducibility: < +/-5% ● For more details, please contact us or download the catalog.
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Our development technology has obtained international patents and plays a significant role in society. The super DLC (hydrogen-free ta-C film) produced by the FCVA method is formed through a completely different process compared to DLC films generated by existing PVD and CVD methods. Additionally, there is a composite metal film called "Micc film" that excels in release properties between metals and plastics. Coating films produced by the FCVA method are currently being rapidly adopted in fields such as the hard disk industry, precision machinery industry, and semiconductor industry, and future expansion into the automotive industry, nanoimprint industry, and biomaterials field is anticipated.