Supports ultra-high vacuum and extremely low oxygen atmosphere!
This product is a stainless steel microchamber designed for high temperature, ultra-high vacuum, and extremely low oxygen atmosphere. Four sets of measurement probes (deep needles) can be precisely positioned using a 3-axis (X, Y, Z) stage, and it incorporates Peltier elements and microheaters, allowing for the heating and cooling of samples. A high vacuum atmosphere of 1×10E-6 Pa can be achieved with the included turbo molecular pump. 【Features】 ■ Supports "zero leakage" ultra-high vacuum (1x10E-6 Pa) ■ Useful for the development of various devices and sensors ■ Allows for the heating and cooling of samples ■ High-precision positioning of measurement probes enabled by the 3-axis stage (X, Y, Z) *For more details, please refer to the catalog or feel free to contact us.
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basic information
【Specifications】 ■ Vacuum level inside the chamber: 10-6 Pa range (when directly connected to TMP) ■ Leak rate: 1×10-10 Pa·m³/sec or less ■ Chamber material: Stainless steel ■ Measurement probe: Tungsten (tip 20μmR, 4 sets) ■ Probe movement distance: X-axis ±6mm, Y-axis ±6mm, Z-axis ±8mm ■ Current input terminal: Maximum 16.5A (1 set) ■ Thermocouple: K type (1 set) ■ Dimensions: W350×D315×H120 ■ Weight: Approximately 12kg *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Development of various devices and sensors ■Heating and cooling of samples, etc. *For more details, please refer to the catalog or feel free to contact us.
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Company information
We develop and provide a new type of oxygen partial pressure control device that balances high functionality and low cost, high-temperature superconducting devices, high-temperature solid oxide fuel cells (SOFC), antenna data visualization software necessary for mobile phone development, and control systems for fuel cell testing equipment, contributing to research and development in companies and universities, as well as to development-type commissioned projects adopted by governments and other organizations.
