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  3. Measurement and Analysis
  4. Inspection Equipment and Devices
  5. Other inspection equipment and devices
  6. Slim-type 100nm resolution stage (40mm)

Slim-type 100nm resolution stage (40mm)

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FS-1040X(S)

last updated:Jun 03, 2019

シグマ光機
シグマ光機
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Fully closed-loop controllable stage with built-in encoder.

It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by a controller. It is a slim model in the direction of movement. Benefits of being slim: - Space-saving with a long stroke - Ensures space for the reference plate - Compact design for inspection equipment

    Other laboratory equipment and containersOther inspection equipment and devicescontroller
FS-1040X(S).jpg

Slim-type 100nm resolution stage (40mm)

FS-1040X(S).jpg
FS-1040X(S).jpg
  • Related Link - https://www.global-optosigma.com/jp/

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Model: FS-1040X(S) Resolution: 100 nm or 50 nm (built-in scale reading) Reproducibility: ±200 nm or ±100 nm (built-in scale reading) Stroke: 40 mm Maximum moving speed: 10 mm/s Table size: 80×60 mm Compatible controllers: FC-111 or FC-411

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Applications/Examples of results

Fields requiring precise positioning Jigs for optical research Inspection equipment for precision parts

CAD data(2)

Model number overview File
FS-1040X(S) 40mm stroke, 100nm or 50nm resolution (built-in scale reading) operation
  • 2D dxf ( 804KB)
FS-1040X(S) 40mm stroke, 100nm or 50nm resolution (built-in scale reading) operation
  • 3D bmp ( 3MB)

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シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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