A macro optical inspection device equipped with a thin film unevenness detection algorithm using the most sensitive light sensor in the world.
Equipped with a thin film unevenness detection algorithm, the world's most sensitive light sensor. Macro optical inspection is a technology that illuminates an object and detects defects or understands its shape from the reflected light information. Compared to traditional visual inspections or microscopic inspections, it provides high-precision inspection results in a short time, significantly improving manufacturing quality and inspection accuracy in processes like film formation for liquid crystal panels, achieving industry-leading sensitivity. Collaborative partner: Sumix Corporation, an expert in macro optics with four related patents. Jointly developed the thin film unevenness detection algorithm with our company.
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basic information
<Specifications> • Camera resolution: 14µm or higher • Sensor pixel count: Approximately 8,000 pixels • Output image: 8bit • Light source: Dedicated lighting <Features> • Image acquisition with a very high S/N ratio due to a uniquely developed ultra-low noise sensor • Quantification of minute surface irregularities made possible by a dedicated image processing algorithm <Application Examples> • Inspection of bump shapes on semiconductor wafers • Dust detection on semiconductor chucks • Detection of scratches and unevenness on glass surfaces • Shape management of objects with minute surface irregularities
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Applications/Examples of results
Inspection of bump shapes on semiconductor wafers • Dust detection on semiconductor chucks • Detection of scratches and unevenness on glass surfaces • Shape management of surfaces with minute irregularities
Detailed information
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Macro Optical Inspection Device Equipped with a thin film unevenness detection algorithm using the most sensitive light sensor in the world. Macro optical inspection is a technology that illuminates an object and detects defects and understands shapes from the reflected light information. Our macro optical inspection device achieves industry-leading high sensitivity through proprietary technology.
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| Model number | overview |
|---|---|
| TMIS-SYS-xx-01 | ◆ Macro Optical Inspection Device Configuration Module ・Line Sensor・Dedicated Lighting ・Host PC ・Image Processing Software |
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Company information
PB (Private Brand) Business Tokyo Electron Device’s PB business combines image processing, data science, and robotics to develop equipment and embedded solutions that automate and streamline operations in semiconductor and panel manufacturing, as well as factory and logistics environments. Through the inrevium brand, we offer a one-stop service from specification review and design to prototyping, evaluation, pilot production, and mass production. By leveraging our proprietary technologies and integrated in-house capabilities, we help customers improve development efficiency and productivity through automation and labor-saving solutions.