Fluorine coating process [for preventing adhesion of resist] <for photomasks>

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last updated：Nov 17, 2022

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Adding 'resist adhesion prevention' functionality to photomasks for contract processing! Testing possible.

The organic nano-thin film treatment technology "NANOS" can apply functional films that enhance water repellency, oil repellency, stain resistance (fingerprint resistance), and slipperiness (dynamic friction coefficient) to metal and glass substrates such as stainless steel (SUS) and nickel (Ni) through spray treatment and vacuum deposition using a special fluoropolymer. The maximum temperature of the entire process is 80°C, which minimizes thermal impact on the substrate, and since it is colorless and transparent, it has little effect on optical properties. 【Examples of Use】 ■ Target: Photomasks ■ Purpose: Preventing adhesion of resist 【Features】 ○ Excellent water and oil repellency Pure water: over 110°; n-hexadecane: over 68° ○ Thin film thickness can be controlled Spray treatment: 5–10nm (can be controlled in increments of 1nm) Vacuum deposition: 5–45nm (can be controlled in increments of 5nm) ○ Minimal impact on optical properties (colorless and transparent) ○ Low-temperature process Our surface treatment methods include two approaches: deposition and spray methods. You can specify the treatment method or leave it to us. Please feel free to consult with us! (Sales of the machinery itself are subject to consultation.)

Related Link - http://www.katsurayama-tech.com/tandk/service01.ht…

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**[Adoption Results and Effects]** **[Spray Method]** ○ Contact glass for scanners → Prevention of dirt adhesion, improved maintenance ○ Optical components (lenses, cover glass, etc.) → Water-repellent properties, prevention of dirt (fingerprint) adhesion ○ Touch panels → Prevention of dirt (fingerprint) adhesion ○ Metal masks for solder printing → Improved printability, reduced maintenance **[Vacuum Deposition Method]** ○ Inkjet heads → Improved printability ○ Molds for optical components → Improved release properties ○ Stamping molds → Improved release properties, reduced tact time ○ Nanoimprint molds → Improved release properties, high conformity to fine shapes ○ Jigs for transfer processes (such as gravure) → Improved transferability (release agent-free) ○ Photomasks → Prevention of resist adhesion ○ Probes for AFM and STM → Prevention of foreign matter adhesion ● For more details, please contact us or download the catalog.