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  6. Fluorine coating process [for preventing adhesion of resist] <for photomasks>

Fluorine coating process [for preventing adhesion of resist] <for photomasks>

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last updated:Nov 17, 2022

カツラヤマテクノロジー T&K事業部
カツラヤマテクノロジー T&K事業部
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Adding 'resist adhesion prevention' functionality to photomasks for contract processing! Testing possible.

The organic nano-thin film treatment technology "NANOS" can apply functional films that enhance water repellency, oil repellency, stain resistance (fingerprint resistance), and slipperiness (dynamic friction coefficient) to metal and glass substrates such as stainless steel (SUS) and nickel (Ni) through spray treatment and vacuum deposition using a special fluoropolymer. The maximum temperature of the entire process is 80°C, which minimizes thermal impact on the substrate, and since it is colorless and transparent, it has little effect on optical properties. 【Examples of Use】 ■ Target: Photomasks ■ Purpose: Preventing adhesion of resist 【Features】 ○ Excellent water and oil repellency Pure water: over 110°; n-hexadecane: over 68° ○ Thin film thickness can be controlled Spray treatment: 5–10nm (can be controlled in increments of 1nm) Vacuum deposition: 5–45nm (can be controlled in increments of 5nm) ○ Minimal impact on optical properties (colorless and transparent) ○ Low-temperature process Our surface treatment methods include two approaches: deposition and spray methods. You can specify the treatment method or leave it to us. Please feel free to consult with us! (Sales of the machinery itself are subject to consultation.)

    Surface treatment contract service
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Fluorine coating process [for preventing adhesion of resist] <for photomasks>

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  • Related Link - http://www.katsurayama-tech.com/tandk/service01.ht…

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**[Adoption Results and Effects]** **[Spray Method]** ○ Contact glass for scanners → Prevention of dirt adhesion, improved maintenance ○ Optical components (lenses, cover glass, etc.) → Water-repellent properties, prevention of dirt (fingerprint) adhesion ○ Touch panels → Prevention of dirt (fingerprint) adhesion ○ Metal masks for solder printing → Improved printability, reduced maintenance **[Vacuum Deposition Method]** ○ Inkjet heads → Improved printability ○ Molds for optical components → Improved release properties ○ Stamping molds → Improved release properties, reduced tact time ○ Nanoimprint molds → Improved release properties, high conformity to fine shapes ○ Jigs for transfer processes (such as gravure) → Improved transferability (release agent-free) ○ Photomasks → Prevention of resist adhesion ○ Probes for AFM and STM → Prevention of foreign matter adhesion ● For more details, please contact us or download the catalog.

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Thin Film Treatment Technology "NANOS"

Thin Film Treatment Technology "NANOS"

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カツラヤマテクノロジー

カツラヤマテクノロジー T&K事業部

Manufacturing and processing contract

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Katsurayama Technology Co., Ltd.'s proprietary technology, "NANOS," for organic thin film treatment forms a nano-order thin film on the surfaces of materials such as glass and metal, modifying the surface properties to impart new functions such as water and oil repellency. It is already being used in various fields both domestically and internationally, including mobile phones, smartphones, digital cameras, printers, copiers, LCDs, LEDs, and semiconductor-related applications. We will continue to advance application development and proprietary technology development to support technological innovation in the era of nanotechnology.

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