4-probe method using a wafer transport robot! Fully automatic measurement sorter.
The WS-8800 is a contact-type resistance measuring instrument with a fully automatic type (fully automatic measurement system). It is capable of thickness measurement, PN measurement, and temperature measurement (for silicon wafers). It can accommodate any number of cassettes. Additionally, it can be customized in various ways according to customer requests. 【Features】 ■ Fully automatic ■ Self-test function, wide measurement range ■ Thickness, peripheral position, and temperature correction functions (resistivity measurement) *For more details, please contact us or download the catalog.
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【Measurement Specifications】 ■Measurement Target: Semiconductor and solar cell materials (silicon, polysilicon, SiC, etc.) ■Measurement Size: 3 to 8 inches (or 12 inches) ■Measurement Range ・Resistivity: 100μ to 1MΩ/cm ・Sheet Resistance: 1m to 10MΩ/sq *For more details, please contact us or download the catalog.
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We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.