For improved inspection efficiency! This is a positioning device with nanometer resolution and excellent reproducibility, featuring a built-in linear encoder.
This device consists of a stage and controller that incorporate a uniquely developed linear encoder. The reading values from the stage's encoder have a resolution of 1nm to 100nm after amplification processing. The movable range is from 20mm to 300mm (the lineup varies depending on the resolution). The controller is equipped with a feedback circuit and motor driver, allowing for feedback control of the stage. It features various communication interfaces, enabling command control from a PC or similar devices. We also offer vacuum-compatible products. We have a track record of manufacturing wafer positioning stages tailored to the size of vacuum chambers.
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basic information
We exhibited at the Positioning EXPO within OPIE'19. Date: April 24 to 26, 2019 Time: 10:00 AM to 5:00 PM Location: Pacifico Yokohama Booth Number: E-17 Exhibits: 1nm resolution positioning device, vacuum-compatible 1nm resolution positioning stage
Price information
Over 500,000 yen
Delivery Time
※1.5 months
Applications/Examples of results
Optical (including synchrotron radiation) research field Various inspection devices (electron microscopes, fluorescence microscopes, etc.) Special processing equipment (micro-scratches, etc.)
Line up（4）
| Model number | overview |
|---|---|
| FS-1020UPX | Positioning stage with built-in linear encoder, 1nm resolution, 20mm stroke |
| FC-901U | Controller for positioning stage with 1nm resolution |
| FC-511 | Controller for positioning stage with 10nm resolution |
| FS-3200PX | Positioning stage with 10nm resolution, movable range: 200mm |
catalog（2）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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