Ultra-high purity diaphragm valve. Capable of approximately 100 million open/close cycles (under our test conditions) for atomic layer deposition (ALD) and high-speed switching (less than 5ms).
The Ultra Fast Series is designed for high-purity processes that require high-speed opening and closing at high temperatures, operating stably under precisely the same conditions, as exemplified by atomic layer deposition (ALD process) applications. It employs a unique flow control mechanism (patent pending US61/910,079) that allows for fine adjustments to maintain accurate flow rates during use. <Features> - High-speed valve opening and closing (valve response time: less than 5 ms) - Ultra-long lifespan (passed 100 million opening and closing tests) - Pressure resistance: Vacuum to 1 MPa (150 psi) - Body material: SS316L VAR or VIM/VAR (compliant with SEMI F20-0305) - Operating temperature range: -10 to 120°C (standard bonnet) -10 to 200°C (extended bonnet) - Sizes: 1/4", 1/2" - Surface finish (average): 5 microinches - Valve types: 2-port, 3-port, 4-port - Optional thermocouple and heater cartridge hole processing available - Optional solenoid valve and limit switch compatibility *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
Applications of Atomic Layer Deposition (ALD)
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Company information
Ham-Let, headquartered in Israel, has local subsidiaries in the United States, Canada, the United Kingdom, Germany, France, the Netherlands, Russia, Singapore, and Japan. The company specializes in products such as fittings, process valves, manifolds, ultra-clean diaphragm valves, high-purity fittings, pressure gauges, flexible hoses, filters, relief valves, sampling cylinders, and flanges, serving various industries including energy, oil, gas, turbines, chemicals, petrochemicals, natural gas, electronics, and analysis. It is a global company actively promoting M&A worldwide to increase its workforce and expand its business. Ham-Let Motoyama Japan, the Japanese branch, primarily operates in the electronics sector through direct sales and approximately 60 agents and distributors established nationwide. The company's main products for the electronics sector, ultra-clean diaphragm valves and high-purity fittings, are supplied from the Israeli headquarters factory via air freight twice a week, ensuring a steady supply and inventory, and are shipped daily nationwide from the logistics center in Tokyo. In recent years, the company has been focusing more on general industry and plant engineering by leveraging the resources of its group companies.