A stage that achieves nanometer resolution, high reproducibility, and high retention using a linear encoder! Stroke in the order of hundreds of millimeters!
Comprehensive catalog of high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) designed, manufactured, and sold by Sigma Tech. It covers specifications, configurations, prices, and options for feedback stages, feedback stage controllers, and cables. Please feel free to consult us about anything related to positioning. ■ Features and Description of Atmospheric Systems We develop, manufacture, and sell compact positioning devices equipped with linear scales. These are used in semiconductor-related equipment, communication-related applications, and advanced research optical systems, and we respond to customer needs based on our expertise. ■ Features and Description of Vacuum-Compatible Systems Based on the know-how gained from custom solutions since our founding, we provide high resolution and high precision reproducibility for vacuum applications. For more details, please download the catalog or contact us.
![Toppage_FeedBackStageSystemCatalog[NO5].jpg](https://image.mono.ipros.com/public/product/image/5c5/2000280081/IPROS24519237276662685407.jpeg?w=280&h=280)
Inquire About This Product
basic information
◆Atmospheric Positioning Device This positioning device achieves high resolution, high repeatability, and high position holding capability through a feedback stage equipped with our self-developed optical linear scale and a feedback stage controller with unique feedback control functionality. ◆Vacuum-Compatible System By combining a feedback stage with an integrated optical linear scale and a feedback stage controller equipped with our proprietary control circuit, we have realized full closed-loop control within a vacuum.
Price range
Delivery Time
Applications/Examples of results
Research, development, and inspection requiring precise positioning Research applications in the optical field Sample stage for semiconductor lithography equipment Microscope stage
Line up（9）
| Model number | overview |
|---|---|
| FS-1020UPX | 20mm stroke, 1nm resolution (built-in scale reading) operation |
| FS-1020SPX | 20mm stroke, 5nm resolution (built-in scale reading) operation |
| FS-1020PX | 20mm stroke, 10nm resolution (built-in scale reading) operation |
| FS-1020X | 20mm stroke, 100nm or 50nm resolution (built-in scale reading) operation |
| FC-911 | 1nm resolution feedback stage controller |
| FC-611 | 5nm resolution feedback stage controller |
| FC-511 | 10nm resolution feedback stage controller |
| FC-411 | 50nm resolution feedback stage controller |
| FC-111 | 100nm resolution feedback stage controller |
catalog（11）
Download All Catalogs
Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.