Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.
This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.
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basic information
○ High-precision repetitive positioning is possible with full closed-loop control ○ Table size: 120mm × 120mm ○ Table movement: 5mm or 10mm ○ Repetitive positioning accuracy: ±20nm ○ Compatible vacuum level: 10^-4Pa ○ Minimum resolution: 10nm ○ Maximum movement speed: 2mm/sec ○ Compatible controller: FC-511 ■□■ For more details, please request documentation or download the catalog ■□■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection, optical system delay stages, microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.