High-resolution positioning stage with built-in encoder for use in a vacuum.
The built-in optical linear encoder detects the position of the stage and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position holding capability. Due to the use of components that are less likely to outgas in the vacuum chamber, the stage can be placed inside the vacuum chamber. It can operate within a range of 40mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).
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basic information
Minimum resolution: 50nm (when using FC-411) : 100nm (when using FC-111) Maximum movement speed: 2mm/sec Stroke: 40mm Compatible controllers: FC-411 or FC-111 Compatible vacuum level: 10^-4 Pa ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. The typical areas of use include information and communication technology, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, microscope stages, scanning electron microscopes, X-ray utilization technologies, and ultra-fine processing. It is utilized in inspection devices and experimental equipment that require precise positioning and reproducibility.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.