Settings parameters and operational data can be stored in the pump body!
The 'TG397M / TG427M / TG907M / TG1307M' handled by Osaka Vacuum Equipment Manufacturing Co., Ltd. has achieved low power consumption through improvements in the magnetic levitation motor compared to conventional magnetic bearing turbo molecular pumps. Additionally, it is equipped with a memory function that stores operational data, touchdown counts, and other information in the pump body, allowing for data transfer even when the controller is replaced during overhauls. 【Features】 ■ Energy-saving design ■ Ability to retain operational data, touchdown counts, model information, etc., in the main unit *For more details, please refer to the catalog or feel free to contact us.
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【Other Features】 ■Various communication specifications: Parallel I/O, RS232C, RS485, Profibus, DeviceNet, EtherCAT ■Compliance with international standards: NRTL/SEMI-S2/CE *For more details, please refer to the catalog or feel free to contact us.
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【Applications】 - Semiconductor manufacturing equipment - FPD manufacturing equipment - Solar cell manufacturing equipment - Processing of optical components such as glass/lenses - Film processing - Accelerator/space environment testing equipment *For more details, please refer to the catalog or feel free to contact us.
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We provide our customers with reliable products that can be used with peace of mind, satisfaction, and for a long time! Osaka Vacuum is committed to offering vacuum equipment that satisfies our customers by setting four major goals: "Customization," "Advanced Safety Measures," "Future-Oriented," and "Customer Support System," and we are dedicated to realizing and further deepening these goals.