This single device can perform layer misalignment analysis and exposure film measurement.
The MVX-818 is an X-ray transmission type two-dimensional measuring device that performs pattern visualization confirmation and pattern coordinate measurement of multilayer substrates using an X-ray camera. By measuring at each stage from exposure to completion, it is possible to analyze the expansion, contraction, and deformation of the substrate. Since it is also equipped with a CCD camera, it can measure exposure films and other items that cannot be measured with X-rays, allowing for analysis of each process with a single device. 【Features】 ■ Feedback of measurement data before and after the manufacturing process of multilayer substrates ■ Zoom function of the X-ray camera ■ High-precision measurement from large patterns to small patterns ■ Stable measurements *For more details, please refer to the catalog or feel free to contact us.
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【Specifications】 ■Measurement board size: 700×600mm ■Measurement board thickness t: 1<6mm ■X-ray camera: 1 unit ■CCD camera: 1 unit ■X-ray generator: 90Kv Max 0.1mA Max ■Minimum display unit: 0.001mm ■Ambient temperature: 22℃ ±1 ■Ambient humidity: 60±10% RH ■Power supply: 220V (3-phase) 50/60Hz 3KW ■Machine dimensions: 1750W×2050D×1760H ■Weight: 3000Kg *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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