Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!
The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 - Control method: RS232C and parallel photo I/O - All axes use 2-phase stepping motors - High-speed and high-precision wafer transport with S-curve acceleration and deceleration control - Wafer retention using vacuum suction, drop-in, and edge grip chucks - Chuck materials can be various, including CFRP, aluminum, ceramics, etc. - Custom chucks available to match the transported items and equipment layout *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Usage】 ■Wafer transport in semiconductor manufacturing equipment, inspection equipment, etc. *For more details, please refer to the catalog or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."