A twin-arm robot optimal for wafer transport in semiconductor manufacturing equipment!
The "STHR4000 Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. Equipped with two arms, it enables quick wafer exchanges and is primarily suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations available in two sizes: 95mm and 156mm - Z-axis variations available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Adoption of twin arms reduces wafer exchange time - Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.
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basic information
【Other Features】 ■ Equipped with operation monitor ■ Control method is RS232C and parallel photo I/O ■ All axes use 2-phase stepping motors ■ High-speed and high-precision wafer transport with S-curve acceleration and deceleration control ■ Wafer retention using vacuum suction, drop-in, and edge grip chuck ■ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ■ Can accommodate optimal chucks tailored to the transported items and equipment layout *For more details, please refer to the catalog or feel free to contact us.
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【Usage】 ■Wafer transport in semiconductor manufacturing equipment, inspection equipment, etc. *For more details, please refer to the catalog or feel free to contact us.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."