A waterproof clean robot ideal for wafer transport in acidic and alkaline environments!
The "SWHR3156 series" is a waterproof clean robot with a 3-axis cylindrical coordinate system, equipped with a flip and edge grip function, compatible with 300mm wafers. It has an IP64 protection rating and is suitable for wafer transport in acidic and alkaline atmospheres during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variation: 156mm - Z-axis variation: 200mm and 300mm - Load capacity: 3kgf or less, calculated at the third joint of the arm - The arm section is coated with Teflon for corrosion resistance - The arm joint structure uses V seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.
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【Other Features】 ■ Sealing at the joints of parts with a Viton gasket ■ Use of bellows in the Z-axis waterproof structure ■ Equipped with operation monitoring ■ Control method using RS232C and parallel photo I/O ■ All axes use 2-phase stepping motors ■ High-speed, high-precision wafer transport with S-curve acceleration and deceleration control ■ Wafer retention using vacuum suction, drop-in, and edge grip chucks ■ Compatible with optimal chucks tailored to the transported items and equipment layout *For more details, please refer to the catalog or feel free to contact us.
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【Usage】 ■Wafer transport in acidic and alkaline environments, etc. *For more details, please refer to the catalog or feel free to contact us.
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