A clean robot that achieves a small footprint and lightweight design!
The "SSCR3115S series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It allows for a compact device layout. Additionally, due to its small footprint and lightweight design, it is ideal for transporting small wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Maximum load capacity is 0.2 kgf or less at the third joint of the arm (work only) - Equipped with a motion monitor - Control methods include RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 ■ Compatible with SSCR2090S-PM units, can be modified to link arm specifications and Z-axis-less specifications ■ Wafer holding with vacuum suction ■ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ■ Can accommodate optimal chucks according to the transported items and equipment layout *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Application】 ■ Small wafer transport in semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, etc. *For more details, please refer to the catalog or feel free to contact us.
catalog(1)
Download All CatalogsCompany information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."