A clean robot that is optimal for wafer transport in semiconductor manufacturing equipment, such as inspection devices!
The "SCR3000CS Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is suitable for wafer transport within semiconductor equipment and inspection devices, and can accommodate optimal chucks tailored to the transported items and equipment layout. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations: 100mm, 130mm, 160mm, 200mm - Z-axis variations: selectable from 200mm onwards - Maximum load capacity: 3kgf or less based on the third joint of the arm - Equipped with operation monitoring - Control methods: RS232C and parallel photo I/O *For more details, please refer to the catalog or feel free to contact us.
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【Other Features】 ■ Uses full-axis 2-phase stepping motors ■ High-speed and high-precision transport of wafers through S-curve acceleration and deceleration control ■ Wafer holding with vacuum suction, drop-in, and edge grip chucks ■ Chuck materials can be customized to various options including CFRP, aluminum, and ceramics ■ Can accommodate optimal chucks tailored to the transported items and equipment layout *For more details, please refer to the catalog or feel free to contact us.
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【Usage】 ■Wafer transport in semiconductor manufacturing equipment, inspection equipment, etc. *For more details, please refer to the catalog or feel free to contact us.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."