Pursuing and achieving high quality, low cost, and high equipment productivity at all stages!
The "X-300" is a nano imprinting device capable of both thermal and UV methods, suitable for R&D pilot production. We pursue and achieve high quality, low cost, and high equipment productivity at all stages from R&D to mass production. Our company provides a total solution for nano imprinting aimed at R&D and mass production. 【Features】 ■ Compatible from R&D to pilot production ■ Dual-use for thermal and UV methods ■ High quality ■ Low cost ■ High equipment productivity *For more details, please refer to the catalog or feel free to contact us.
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【Specifications (Excerpt)】 ■Process Method: Batch Transfer Method ■Target Workpieces ・Thermoplastic Resin ・UV-Curable Resin (UV Specification) *Optional ・Various Glasses (High-Temperature Specification) *Optional ■Maximum Pressure: 50kN ■Mold Size: □100mm (Only for thermal type, φ150mm possible) ■Substrate Size: □100mm (Only for thermal type, φ150mm possible) ■Maximum Mold Heating Temperature ・Room Temperature to 250℃ ・Room Temperature to 650℃ (Optional) ■Maximum Substrate Heating Temperature ・Room Temperature to 250℃ ・Room Temperature to 650℃ (Optional) ■Cooling Mechanism ・Up to 250℃: Forced Air Cooling - Forced Water Cooling Switchable ・Above 250℃: Forced Air Cooling (Optional) ■In-Plane Temperature Uniformity: ±1℃ ■Maximum Continuous Load Time: 30 minutes ■Maximum Stage Stroke: 100mm ■Minimum Stage Position Resolution: 0.05μm ■Minimum Stage Movement Speed: 0.05μm/sec ■External Dimensions: H1,800×D1,350×W900(mm) *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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To perform nano-sized microfabrication at a low cost, various technological elements such as equipment, optical design, molds, materials, nanoimprinting, etching, and inspection are essential. Our company has engineers from various fields and can provide the necessary technological elements required by our customers. We offer comprehensive support that goes above and beyond to meet the diverse needs of our customers, whether for optical applications or electronic applications. If you are considering microfabrication, especially nano wafer processing, please do not hesitate to contact us.