Ultra-high vacuum portable transport system equipped with a transport mechanism and a substrate storage section.
This system is a portable ultra-high vacuum transport system equipped with a mobile ion pump that operates on commercially available batteries. Developed by the National Institute of Information and Communications Technology (NICT), it comes standard with a compact and lightweight transport mechanism and substrate storage section. By equipping this system, it is also possible to send samples via courier without contaminating them. 【Features】 ■ Equipped with a mobile ion pump that operates on batteries ■ Capable of transporting samples while maintaining ultra-high vacuum ■ Can be transported via courier by storing it in a suitcase ■ Includes sample transport functionality ■ Allows connection and sample exchange with systems that do not have a transport mechanism *For more details, please refer to the catalog or feel free to contact us.
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basic information
**Main Specifications** ■ Pump used: Composite small mobile ion pump (PMI-070NEGS or PMI-114-NEGS) ■ Storage board ・ PML-100: Maximum 1 inch ・ PML-200: Maximum 2 inches ■ Transport mechanism ・ Magnetic coupling type transport mechanism ・ Stroke approximately 300mm, capable of linear and rotational movement ■ Storage chamber dimensions ・ PML-100: 180×80×80 ・ PML-200: 250×130×150 ■ Valve ・ PML-100: Mini flange exhaust port with 70ICF gate valve ・ PML-200: 70CF flange exhaust port with 114CF gate valve ■ Weight: Approximately 30kg (including gate valve) ■ Pressure range: 10^-4Pa to 10^-9Pa *For more details, please refer to the catalog or feel free to contact us.*
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For more details, please refer to the catalog or feel free to contact us.
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PVR is a company that focuses on the design, manufacturing, and modification of vacuum equipment such as PLD and sputtering devices. Our main products include PLD devices, "single-unit sputtering devices," "multi-unit sputtering devices," and "sputtering guns." Please leave all your vacuum technology equipment needs to us.