Improving long-term stability of devices! Thin film getter deposition process designed for MEMS vacuum packaging.
Getter films for MEMS are products specifically developed for MEMS packaging. We offer products for both wafer-level packages (PageWafer) and discrete packages (PageLid, PageSheet), all of which maintain the high vacuum levels required for packaging and contribute to the long-term reliability and stability of the devices. Currently, getters for MEMS are commonly used in various hermetically sealed MEMS products for military and defense, automotive, industrial, and consumer applications, and are widely accepted as a technology for maintaining vacuum within packages. 【Features】 - Compatible with high vacuum packages - Ensures long-term reliability - High adsorption performance for active gases - Activation temperature adaptable to almost all sealing processes - Supports two types of patterning methods (metal mask/lift-off) particle-free
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basic information
**Basic Information on Getter Materials** Getter materials play a crucial role in improving and maintaining the vacuum environment inside sealed devices. They can adsorb all active gases (such as O2, H2O, CO, CO2, N2, etc.) through chemical reactions in a vacuum. Different getter metal alloys and shapes have been developed according to their applications and production processes. Additionally, we respond to various technical requirements for getters through collaboration with our customers. For example, we also offer services such as contract and prototype work for vacuum packaging, sealing accuracy tests using ultrasonic microscopy, residual gas analysis tests, outgassing tests, and leak rate measurement tests.
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Applications/Examples of results
【Applications】 ● Non-cooling IR sensor ● MEMS gyro ● Oscillator ● Timing device ● High-performance pressure sensor
Company information
The "Saes Getters Group," a global pioneer in getter technology, has been providing solutions for various applications, such as high and ultra-high vacuum environments and the deposition of pure metals, since its founding in the 1940s (including gas/moisture adsorbents, mercury/alkali metal deposition sources, etc.). Additionally, the company has actively invested in research and development, and since 2004, it has expanded its business into the Nitinol market. The superelastic properties of Nitinol are applied in medical devices, while its shape memory characteristics are utilized in industrial and household electrical appliances.
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