We will establish a vacuum environment within the sealed device, contributing to the long-term maintenance of reliability.
As an additional service, the following is possible: ○ Integration testing of bonding lines using an ultrasonic microscope ○ RGA testing (Residual Gas Analysis) ○ Outgassing testing ○ Leak rate measurement testing 【Features】 ○ Vacuum discrete packaging ○ Integration with getters ○ Fast prototyping ○ Process development tailored to requirements ○ Foundry services
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basic information
Strict management of the vacuum state within hermetically sealed devices is one of the key elements for maintaining long-term stability. In addition to using getter materials that contribute to stable operation, precise control of the sealing environment is essential for achieving the desired vacuum state. Leveraging years of experience in MEMS packaging and its sealing devices, Saes is now offering vacuum discrete package services, providing customers with complete solutions. Integrating appropriate getters (porous, thick film, thin film, etc.) and coating-type dryers within the package, along with ensuring suitable activation conditions, is crucial for obtaining fast and reliable vacuum package solutions. Saes' packaging facility is equipped with a cleanroom environment for rapid prototyping, process development, and foundry services, and features state-of-the-art sealing devices for both ceramic and metal packages.
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Applications/Examples of results
【Applications】 ● Inertia sensor (accelerometer and gyro) ● Microbolometer ● Resonator ● Time-frequency device ● Pressure sensor ● Optical equipment
Company information
The "Saes Getters Group," a global pioneer in getter technology, has been providing solutions for various applications, such as high and ultra-high vacuum environments and the deposition of pure metals, since its founding in the 1940s (including gas/moisture adsorbents, mercury/alkali metal deposition sources, etc.). Additionally, the company has actively invested in research and development, and since 2004, it has expanded its business into the Nitinol market. The superelastic properties of Nitinol are applied in medical devices, while its shape memory characteristics are utilized in industrial and household electrical appliances.
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