High-temperature heaters for semiconductor manufacturing, electrostatic chucks, and thermal shock-resistant ceramics.
Supports manufacturing processes for silicon semiconductors, SiC, and GaN power semiconductors. Exhibits excellent performance in high temperatures, vacuum, and corrosive gas environments.
Pyrolytic Boron Nitride (PBN) and Tantalum Carbide possess high heat resistance and corrosion resistance, making them ceramics that can easily achieve rapid temperature rise and ultra-high temperatures. PBN can be deposited or processed into various shapes. There are also ultra-high temperature heaters, high-temperature electrostatic chucks, and graphite protective coatings available. PBN functional components contribute to improvements in the manufacturing processes of organic EL, semiconductor single crystal growth processes, and other high-temperature vacuum processes. 【Features】 ■ Compatible with 12-inch wafers (300mm wafers) ■ Usable under ultra-high vacuum and high temperature (1700℃*) ■ Maintains high electrical insulation even at high temperatures ■ Tough and resistant to breaking ■ Chemically stable *For more details, please download the PDF or feel free to contact us.
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basic information
*This is based on internal test results.
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Applications/Examples of results
High-performance heaters and electrostatic chucks Applications - Thermal processing of wafers through rapid temperature rise and fall - Film formation of nitride semiconductors - PVD (sputtering, MBE, evaporation, etc.) - Ion implantation - Glass heating - High-temperature heating in a vacuum PBN (ultra-high purity boron nitride) components Applications - Crucibles for vacuum deposition - Crucibles for crystal growth - Containers for reactions and firing - Electrical insulation components at high temperatures - Components in high-temperature corrosive atmospheres Graphite protective coatings Applications - Heaters for ultra-high temperatures - Components for nitride semiconductor film formation - Wafer trays - Gears for high temperatures - Components for SiC semiconductor crystal growth and film formation
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Momentive Technologies Japan Co., Ltd. develops, manufactures, and sells high thermal conductivity heat sinks, heaters/electrostatic chucks, ceramic products, and corrosion/heat-resistant coatings. We also handle a wide range of quartz and silicone products. Please feel free to contact us when you need assistance.