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  6. Calibration grating for AFM and SPM

Calibration grating for AFM and SPM

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last updated:Aug 24, 2017

東京インスツルメンツ
東京インスツルメンツ
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Calibration of various SPM systems and evaluation of SPM probes. Also suitable as standard samples for measurements.

This is a reference sample for AFM and SPM calibration. You can choose the most suitable one according to your application. - Calibration of X-axis, Y-axis, and Z-axis - Nonlinearity detection - Detection of nonlinearity in the horizontal and vertical directions - Detection of angular deformation - Determination of tip shape parameters (aspect ratio, radius of curvature), tip degradation, and contamination control. - Detection of hysteresis, creep, and cross-coupling effects - Tip characteristics - 3-D visualization of the scanning tip - Determination of the aspect ratio of the tip - Calibration in sub-micron units on the X-axis or Y-axis It can also be used for practice in SPM measurements and for student experiments.

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Calibration grating for AFM and SPM

  • Related Link - http://www.tokyoinst.co.jp/products/detail/NT04/in…

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basic information

■TGZ1, TGZ2, TGZ3 A grating with a length of repeated concave and convex patterns used for calibration of the Z-axis and detection of nonlinearity. ■TGG1 A grating with parallel ridges measured in micrometers. ■TGQ1 A grating for calibration and nonlinearity measurement of the X, Y, and Z axes. ■TGT1 A grating for examining the parameters of the tip shape of the cantilever used. ■TGX1 A grating arranged with sharply cut edges of rectangular prisms for lateral calibration and nonlinearity measurement. ■TDG01 A grating for calibration in sub-micron units along the X or Y axis.

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P2

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Applications/Examples of results

■Calibration work for scanning probe microscopy ■Practice samples for SPM measurements ■Student experiments

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Model number overview
TGZ1 A calibration sample with a one-axis shape formed on a SiO2 layer on a silicon wafer, with a typical step height of 21.6nm. 【Application】 Z-axis calibration, nonlinearity detection
TGZ2 A calibration sample with a one-axis shape formed on a SiO2 layer on a silicon wafer, with a typical step height of 107nm. 【Application】 Z-axis calibration, nonlinearity detection
TGZ3 A calibration sample with a one-axis shape formed on a SiO2 layer on a silicon wafer, with a typical step height of 560nm. 【Application】 Z-axis calibration, nonlinearity detection
TGG1 A calibration sample with a one-axis shape that has precise straight lines and angular sizes, featuring triangular steps formed on a silicon wafer. 【Application】 X-axis or Y-axis calibration, detection of lateral and vertical nonlinearity, detection of angular deformation, tip characteristics
TGQ1 A calibration sample with a small square 3-D array formed on a silicon wafer. 【Application】 Simultaneous calibration in X, Y, and Z directions, lateral calibration, detection of lateral nonlinearity, hysteresis, creep, and cross-coupling effects
TGT1 A calibration sample with an array of sharp tips formed on a silicon wafer. 【Application】 3-D visualization of scanning tips, determination of tip shape parameters (aspect ratio, radius of curvature), tip degradation, and contamination control.
TGX1 A grating with sharply cut edges of square prisms arranged for lateral calibration and nonlinearity measurement. 【Application】 Lateral calibration, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects, and determination of tip aspect ratio
TDG01 A calibration sample that creates parallel ridges with a one-axis shape on a chalcogenide glass layer formed on a glass wafer. 【Application】 Calibration in sub-micron units along the X or Y axis

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東京インスツルメンツ

東京インスツルメンツ

Testing, Analysis and Measurement

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We are a group of experts specializing in spectroscopy, focusing on cutting-edge equipment such as light sources, spectrometers, detectors, our unique laser measurement systems, analytical devices, and femtosecond laser processing.

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