Manufacturing of components and products for semiconductor manufacturing equipment using precision micro-machining technology.
Total support for precision micro machining, finishing, precision cleaning, and clean packaging is available. Introduction of multi-variety compatible parts feeders and thin film sheet suction plates.
Our company manufactures components and products for semiconductor manufacturing equipment through high-precision "micro-hole processing" and high-quality "mirror finishing." One of our major features is our ability to provide total support from processing to finishing, precision cleaning, quality inspection, packaging, and shipping. We also handle many components for vacuum devices, performing high-quality finishing that suppresses outgassing. Additionally, we conduct precision cleaning, inspection, and packaging in a clean room, delivering products vacuum-packed to enable direct installation into our customers' equipment. We also manufacture and sell the vibration-free parts feeder "Trefeeder," which reduces chipping, scratches, and static electricity in electronic components. Currently, we are offering "Precision Processing Technology Handbook Vol. 4," which introduces examples of our work. [Our Technology and Support] ■ Precision micro-hole processing ■ Ultra-fine finishing ■ Precision micro-component processing ■ Precision micro-groove processing ■ Metal 3D printing ■ Design/Manufacturing support *For more details, please refer to the materials. Feel free to contact us with any inquiries.
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**Contents of the Technical Handbook (Excerpt)** ■ Ultra-Precision Micro-Hole Processing Technology Introduction of high-precision micro-hole processing technology developed through synthetic fiber spinning nozzles. Processing methods: FIB, micro-drilling, micro-pressing, laser, ultra-fine discharge machining Features: High-quality hole processing, high-speed precision micro-hole processing at 100 holes per second ■ Precision Finishing Processing Technology Control of sparks with high-quality and high-precision surface roughness. Surface roughness: Ra 0.01 μm ■ Examples of Parts and Products for Semiconductor Manufacturing Equipment Introduction of apertures, collimators, and optical system nozzles that control light and electron beams. ■ Trefeeder (Parts Feeder) Aligns and transports parts without vibration. Supports multi-variety switching with dedicated attachments. ■ Suction Plates and Sheet Transport Jigs Fixes thin film sheets without leaving suction marks. ■ SIM Image Tomograph Obtains sliced cross-section processing and cross-section SIM images using FIB equipment. *For more details, please refer to the materials. Feel free to contact us with any inquiries.*
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Precision micro-machining technology is increasingly recognized as a common foundational technology that supports modern advanced industries. Since its establishment in 1955, Toray Precision Co., Ltd. has manufactured spinnerets, which are key technologies for synthetic fiber production, and has contributed to the development of the synthetic fiber industry by providing them to fiber manufacturers worldwide, including Japan and Europe and the United States. Meanwhile, the experience and technology gained during this time in precision micro-machining have been widely applied to other industrial sectors. Precision machined components are incorporated into critical parts of aircraft, industrial robots, measurement and control equipment, etc. Additionally, the specially developed and designed fluid nozzles have demonstrated their functionality as important components in various industrial machines. The ultra-precision micro-machining technology, boasting sub-micron precision, is also utilized in the optical communication field, which is essential for realizing a highly information-oriented society. We have also commercialized various optical devices, including optical components such as ferrules and adapters. As a pioneer in ultra-precision micro-machining technology, we will continue to contribute to society by delivering high-precision, high-quality products.
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