Vacuum sealing for load locks and process chambers of semiconductor manufacturing equipment for 200, 300, and 450mm wafers.
- Protection from the process side by placing the bellows inside the actuator - Differential pressure tab made of PEEK material - Maintenance-free actuator - Easy gate replacement - Low shock - Compact design
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basic information
Opening size: 32 x 222mm to 100 x 500mm (1.26“ x 8.74“ to 3.94“ x 19.69“) Actuator: Pneumatic double-acting cylinder with limit switch Body material: Aluminum or stainless steel Sealing technology: MONOVAT mechanism Regardless of the dimensions of the gate opening, the actuator adopts a common modular system.
Price information
Consultation required.
Delivery Time
※Consultation needed.
Applications/Examples of results
It is mainly used in semiconductor manufacturing equipment.
Line up（10）
| Model number | overview |
|---|---|
| 02209-AA24/BA24/AE24/BE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers AA24/BA24 are aluminum, AE24/BE24 are stainless steel |
| 02210-AA24/BA24/AE24/BE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers AA24/BA24 are aluminum, AE24/BE24 are stainless steel |
| 02212-AA24/BA24/AE24/BE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers AA24/BA24 are aluminum, AE24/BE24 are stainless steel |
| 02213-AA24/BA24/AE24/BE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers AA24/BA24 are aluminum, AE24/BE24 are stainless steel |
| 02241-AA24/BA24/AE24/BE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers AA24/BA24 are aluminum, AE24/BE24 are stainless steel |
| 03209-CA24/CE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers CA24 are aluminum, CE24 are stainless steel |
| 03210-CA24/CE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers CA24 are aluminum, CE24 are stainless steel |
| 03212-CA24/CE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers CA24 are aluminum, CE24 are stainless steel |
| 03213-CA24/CE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers CA24 are aluminum, CE24 are stainless steel |
| 03241-CA24/CE24 | Pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※Model numbers CA24 are aluminum, CE24 are stainless steel |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.