By performing the opening and closing actions with an air cylinder, it reduces impact and particles, enabling ultra-long lifespan.
Hatcher, optimal for harsh processes like CVD. - Uniform pressing and extended lifespan of gate seals by real L-MOTION - Easy maintenance from the service cover - Pneumatic locking mechanism in open or closed position - Particle-free, shock-free - Adjustable sealing force to match sealing materials - Low shock
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basic information
Protecting the process side by placing the bellows inside the actuator Opening size: 50 x 336mm to 80 x 500mm (1.97“ x 13.23“ to 3.15“ x 19.69“) Actuator: Pneumatic double-acting cylinder with limit switch Body material: Uncoated or hard anodized aluminum Sealing technology: L-MOTION
Price information
Consultation needed.
Delivery Time
※Consultation required
Applications/Examples of results
For vacuum sealing of load lock chambers and process chambers in semiconductor manufacturing equipment. Ideal for harsh processes such as etching and CVD. Also used in the production of high-brightness LEDs.
Line up（8）
| Model number | overview |
|---|---|
| 04312-BA24/BH24 | Valve pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※BA24 is aluminum / BH24 is hard anodized aluminum |
| 04313-BA24/BH24 | Valve pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※BA24 is aluminum / BH24 is hard anodized aluminum |
| 04331-BA24/BH24 | Valve pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※BA24 is aluminum / BH24 is hard anodized aluminum |
| 04344-BA24/BH24 | Valve pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※BA24 is aluminum / BH24 is hard anodized aluminum |
| 05312-LA24/LH24 | Insert pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※LA24 is aluminum / LH24 is hard anodized aluminum |
| 05313-LA24/LH24 | Insert pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※LA24 is aluminum / LH24 is hard anodized aluminum |
| 05331-LA24/LH24 | Insert pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※LA24 is aluminum / LH24 is hard anodized aluminum |
| 05344-LA24/LH24 | Insert pneumatic actuated - double acting cylinder, with limit switch, without solenoid valve ※LA24 is aluminum / LH24 is hard anodized aluminum |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.