Optimal for advanced processes with uniform gas flow.
- Enables uniform exhaust with particle-free operation - Proven track record of excellent pressure control - Equipped with service port (for connecting to PC and Control Performance Analyzer (CPA) via USB)
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basic information
Size: DN 250-450mm (10" – 18") Actuator: Two stepping motors synchronized with feedback control Body Material: Aluminum or hard anodized aluminum Shaft Seal: Bellows Flange: Pump side ISO-F, JIS Chamber side according to customer specifications
Price information
Consultation required
Delivery Time
※Consultation required.
Applications/Examples of results
Downstream pressure control and vacuum sealing valves in the SEMI/FPD process. Ideal for advanced etching processes.
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.