We propose valves that are optimal for handling abrasive slurries.
The handling of slurry can be divided into three main steps: - Adjustment and mixing - Supply and transport - Removal and recovery GEMÜ products are designed with a low-resistance sheet shape that does not impose a load on both the valve and the fluid. All materials in contact with the fluid are made of PTFE or PFA, providing sufficient chemical resistance and high durability against the abrasiveness of slurries containing abrasive particles.
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basic information
For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Examples of Achievements] - Slicing from silicon ingot to wafer - Chemical mechanical polishing (CMP) - Wafer device formation (inter-device separation layer/transistor)
Detailed information
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C60 series PFA/PP diaphragm valve. It suppresses turbulence in the flow path, boasting high stability and flow rate.
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Valve manifold Can be freely laid out and designed according to individual applications. Reduces the risk of leaks by minimizing piping space and reducing connection points.
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HydraLine series High-purity pressure gauge made of PFA. Stable measurement is possible even with slurries.
Line up(2)
Model number | overview |
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GEMÜ C60 | PFA/PP diaphragm valve |
GEMÜ C67 | PFA/PP diaphragm valve |
catalog(1)
Download All CatalogsCompany information
GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.