Ideal for harsh etching and cleaning processes.
- High-speed, particle-free operation - Accurate pressure control - Equipped with service ports (for PC connection and CPA software)
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basic information
Size: DN 250mm Actuator: Equipped with a pressure controller with servo drive Body Material: Aluminum or hard anodized aluminum Standard Flange: ISO-F, JIS
Price information
*Consultation required*
Delivery Time
※*Subject to consultation*
Applications/Examples of results
SEMI, valves for process pressure control and vacuum sealing in FPD. Ideal for harsh etching and cleaning processes.
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.