Extremely short control response time, and easy to use with a compact design.
- Excellent pressure control capability - Equipped with limit switch - Service port equipped (for PC connection or service box connection)
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basic information
Size: DN63-400mm Actuator: Mounted controller Body material: Stainless steel Shaft seal: Rotary shaft seal Standard flange: ISO-F, CF-F, ASA-LP/ASA, JIS Sealing technology: VATLOCK Leak rate: Valve body, valve seat < 1 × 10-9 mbar ls-1 Operating pressure range: DN63-200 1 × 10-8 mbar to 2 bar (abs) DN250-400 1 × 10-8 mbar to 1.2 bar (abs) Maximum allowable differential pressure across the gate: When the valve is closed DN63-200 ≤ 2 bar DN250-400 ≤ 1.2 bar During open/close operation ≤ 30 mbar Number of cycles until the first service: Pressure control One million Close/Open 200,000 Mounting direction: DN63-350 Free DN400 Horizontal Valve open/close position indication: Visual position indication (mechanical and controller)
Price information
Consultation needed.
Delivery Time
※Consultation required.
Applications/Examples of results
Valves for pressure control and vacuum sealing in the SEMI, FPD, and industrial sectors. Especially suitable for sputtering and etching processes.
Line up（37）
| Model number | overview |
|---|---|
| 64236-PEGG | DN63 ISO-F with controller |
| 64238-PEGG | DN80 ISO-F with controller |
| 64240-PEGG | DN100 ISO-F with controller |
| 64244-PEGG | DN160 ISO-F with controller |
| 64246-PEGG | DN200 ISO-F with controller |
| 64248-PEGG | DN250 ISO-F with controller |
| 64250-PEGG | DN320 ISO-F with controller |
| 64252-PEGG | DN400 ISO-F with controller |
| 64236-CEGG | DN63 CF-F metric threads with controller |
| 64238-CEGG | DN80 CF-F metric threads with controller |
| 64240-CEGG | DN100 CF-F metric threads with controller |
| 64244-CEGG | DN160 CF-F metric threads with controller |
| 64246-CEGG | DN200 CF-F metric threads with controller |
| 64248-CEGG | DN250 CF-F metric threads with controller |
| 64236-UEGG | DN63 CF-F UNF threads with controller |
| 64238-UEGG | DN80 CF-F UNF threads with controller |
| 64240-UEGG | DN100 CF-F UNF threads with controller |
| 64244-UEGG | DN160 CF-F UNF threads with controller |
| 64246-UEGG | DN200 CF-F UNF threads with controller |
| 64248-UEGG | DN250 CF-F UNF threads with controller |
| 64236-TEGG | DN63 ASA-LP/ASA with controller |
| 64238-TEGG | DN80 ASA-LP/ASA with controller |
| 64240-TEGG | DN100 ASA-LP/ASA with controller |
| 64244-TEGG | DN160 ASA-LP/ASA with controller |
| 64246-TEGG | DN200 ASA-LP/ASA with controller |
| 64248-TEGG | DN250 ASA-LP/ASA with controller |
| 64250-TEGG | DN320 ASA-LP/ASA with controller |
| 64252-AEGG | DN400 ASA-LP/ASA with controller |
| 64236-JEGG | DN63 JIS maintenance flange with controller |
| 64238-JEGG | DN80 JIS maintenance flange with controller |
| 64240-JEGG | DN100 JIS maintenance flange with controller |
| 64244-JEGG | DN160 JIS maintenance flange with controller |
| 64246-JEGG | DN200 JIS maintenance flange with controller |
| 64248-JEGG | DN250 JIS maintenance flange with controller |
| 64250-JEGG | DN320 JIS maintenance flange with controller |
| 64251-JEGG | DN350 JIS maintenance flange with controller |
| 64252-JEGG | DN400 JIS maintenance flange with controller |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.