Capable of handling large differential pressure!
- Large differential pressure response - The aperture can be set using a memory - Angle and inline body
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basic information
Leak rate Valve body, valve seat: 1 × 10 – 9 mbar ls 1 Operating pressure range DN 63-80: 1 × 10 – 8 mbar to 4 bar (abs) DN 100-160: 1 × 10 – 7 mbar to 2 bar (abs) Maximum allowable differential pressure on the plate Valve opening direction DN 63-80: ≤ 1.2 bar DN 100-160: ≤ 1.2 bar Valve closing direction DN 63-80: ≤ 4.0 bar DN 100-160: ≤ 2.0 bar Maximum allowable differential pressure when opening the valve DN 63-80: ≤ 1 bar DN 100-160: ≤ 1 bar Number of cycles until the first service DN 63-80: three million cycles DN 100-160: one million cycles Shaft seal (main valve) DN 63-80: bellows DN 100-160: O-ring shaft seal Solenoid valve DN 63-80: 24V DC, 9.0W DN 100-160: 24V DC, 9.0W
Price information
Consultation needed.
Delivery Time
※Consultation needed.
Applications/Examples of results
Initial exhaust, suppressing turbulence during venting, for particle generation and substrate vibration suppression.
Line up（20）
| Model number | overview |
|---|---|
| 29028-KA11 | DN25 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29032-KA11 | DN40 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29034-KA11 | DN50 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29036-QA11 | DN63 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29038-QA11 | DN80 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29240-QA11 | DN100 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29244-QA11 | DN160 ISO-KF, aluminum; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29028-KE11 | DN25 ISO-KF, stainless steel; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29032-KE11 | DN40 ISO-KF, stainless steel; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29034-KE11 | DN50 ISO-KF, stainless steel; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29036-QE11 | DN63 ISO-KF, stainless steel; Pneumatic actuated - single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29128-KA11 | DN25 aluminum; inline valve |
| 29132-KA11 | DN40 aluminum; inline valve |
| 29134-KA11 | DN50 aluminum; inline valve |
| 29128-KE11 | DN25 stainless steel; inline valve |
| 29132-KE11 | DN40 stainless steel; inline valve |
| 29240-QA14 | DN100 aluminum; Pneumatic actuated - main valve: double acting cylinder / soft exhaust valve: single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29244-QA14 | DN160 aluminum; Pneumatic actuated - main valve: double acting cylinder / soft exhaust valve: single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29240-QE14 | DN100 stainless steel; Pneumatic actuated - main valve: double acting cylinder / soft exhaust valve: single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
| 29244-QE14 | DN160 stainless steel; Pneumatic actuated - main valve: double acting cylinder / soft exhaust valve: single acting cylinder, closing action is spring (NC), no solenoid valve, no limit switch |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.