Shock-free L-MOTION valve with excellent particle performance.
- Shock-free L-shaped operation - Particle-free, vibration-free operation - Low ownership cost
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basic information
Opening size: 81 × 800 mm to 250 × 3000 mm (3.19" × 31.50" to 9.84" × 118.11") Actuator: Pneumatic double-acting cylinder with limit switch Gate material: Aluminum Sealing technology: L-VAT Leak rate: Gate (closed direction) < 1 x 10^-7 mbar ls^-1 (Δp at gate = 0.1 MPa) Maximum allowable differential pressure on the gate: Valve closed direction: ≤ 1 bar Valve open direction: ≤ 5 mbar Number of cycles until first service: One million Open/close time: ≤ 2.5 s
Price information
Consultation required
Delivery Time
※Consultation required.
Applications/Examples of results
For FPD and PV manufacturing equipment
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.