High throughput due to short opening and closing times.
- Low holding costs - High throughput due to short opening and closing times - Customer-specified design
Inquire About This Product
basic information
Opening size 50 × 500 mm to 100 × 3000 mm (1.97“ × 19.69“ to 3.94“ × 118.11“) Actuator Pneumatic operation: Double-acting cylinder with limit switch Body material: Aluminum or stainless steel Shaft seal: Rotary shaft seal Leak rate Valve body: < 1 × 10-7 mbar Is-1 Valve seat: < 1 × 10-5 mbar Is-1 Maximum allowable differential pressure across the gate Closing direction: ≤1 bar Opening direction: ≤10 mbar (optional 1 bar) Maximum allowable differential pressure when opening the valve: ≤5 mbar Number of cycles until first service: One million Opening/closing time: ≤1.2 s (opening size 80 x 1500 mm) Mounting direction: Actuator upward, downward, horizontal Limit switch Voltage: 10 -30 V DC PNP (NPN optional)
Price information
Consultation required.
Delivery Time
※Consultation required.
Applications/Examples of results
For PV cells and large film deposition equipment. Proven results in numerous PECVD applications.
catalog（1）
Download All Catalogs
Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.