Design adapted to harsh processes and high temperatures.
- High throughput due to short opening and closing times - Designed for harsh processes and high temperatures - Small distance between the flange faces of the valve
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basic information
Opening size: 50 × 500 mm to 300 × 3000 mm (1.97" × 19.69" to 11.81" × 118.11") Actuator Pneumatic operation: Double-acting cylinder with limit switch Body material: Aluminum or stainless steel Shaft seal: O-ring shaft seal Leak rate Valve body: < 1 × 10^-7 mbar Is^-1 Valve seat: < 1 × 10^-5 mbar Is^-1 Maximum allowable differential pressure across the gate: ≤1 bar Maximum allowable differential pressure when opening the valve: ≤5 mbar Number of cycles until first service: One million cycles Open/close time: ≤2 s (opening height 100mm) Mounting direction: Actuator upward, downward, sideways Limit switch Voltage: 10 - 30 V DC PNP (NPN optional)
Price information
Consultation required
Delivery Time
※Consultation required.
Applications/Examples of results
For PV cells and large film deposition equipment, we flexibly accommodate customer-specified designs (e.g., protection from water cooling and heating processes).
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.