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  3. Measurement and Analysis
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  6. Monitoring device "MultiGas TFS Monitor"

Monitoring device "MultiGas TFS Monitor"

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last updated:Feb 13, 2020

日本エム・ケー・エス
日本エム・ケー・エス
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Continuous measurement capable of quickly detecting changes in exhaust gas composition! Trace gas monitoring device.

The "MultiGas TFS Monitor" is a 19-inch rack-mounted, online, multi-gas compatible trace gas monitoring device. It utilizes Tunable Filter spectroscopy technology, which enables high selectivity and stable measurements. This allows for low-cost, high-performance analysis of trace hydrocarbons, moisture, CO, CO2, and N2O, replacing traditional analytical methods. Additionally, the permanent calibration feature eliminates the need for expensive calibration reference gases. 【Features】 ■ High analytical performance ■ Low detection limits, high stability, and a wide range of linearity ■ Integration-ready system that reduces complex setup and installation work ■ Permanent calibration feature eliminates the need for expensive calibration reference gases ■ Low COO (cost of ownership), easy installation and maintenance *For more details, please refer to the PDF document or feel free to contact us.

    Other measurement, recording and measuring instrumentsAnalytical Equipment and Devices
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Monitoring device "MultiGas TFS Monitor"

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  • Related Link - https://www.mksinst.com/Intl/JP1.aspx

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【Other Features】 ■ Continuous measurement for rapid detection of changes in exhaust gas composition ■ Replacement of traditional multi-analyzer methods like FTIR, reducing costs and infrastructure requirements 【Industries】 ■ Air separation facilities ■ Bulk & specialty gases ■ Hydrocarbon processing ■ Semiconductors ■ Exhaust gas/CEM *For more details, please refer to the PDF document or feel free to contact us.

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【Application】 ■ Impurity Monitor ■ Process Safety Monitoring ■ Product Quality Analysis ■ Process Monitoring/Control ■ Emission Monitoring/Control *For more details, please refer to the PDF document or feel free to contact us.

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Monitoring device "MultiGas TFS Monitor"

Monitoring device "MultiGas TFS Monitor"

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日本エム・ケー・エス

日本エム・ケー・エス

Industrial Electrical Equipment

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Our company is a global leading company that provides the latest technologies in manufacturing processes for growth industries, including thin film applications such as semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications such as medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the globe.

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