A vacuum transport module specialized for transporting heavy objects in a vacuum! It solves the challenges of vacuum robot systems and roller systems!
Our company offers a unique concept solution specialized in transporting heavy objects in a vacuum, addressing the challenges of traditional methods (vacuum robot systems and roller systems). With our proprietary mechanism, we enable heavy transport with minimal conveying force, achieving low costs with a simple transport mechanism. Compared to typical products, we have achieved a 50% reduction in thickness, significantly decreasing chamber volume. 【Features】 ■ Simple and slim yet powerful (supports a load of 200kg) ■ Low dust generation mechanism ■ Long stroke compatibility (patent pending 2011-10118) ■ 360-degree rotation capability ■ Dedicated controller with vacuum exhaust function ■ Customization available *For more details, please request documentation or view the PDF data available for download.
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【Specifications】 ■ Portable weight: 200kg or less ■ Transport axes: X: 3000mm, θ: 360°, Z: 100mm ■ Repeatability: ±1mm or less ■ Transport speed: X: 300mm/s, θ: 180° *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Komiyama Electron, we design and manufacture various vacuum equipment in a wide range of fields such as semiconductors, liquid crystals, organic EL, and solar cells, leveraging our strengths in design technology, production technology, vacuum technology, and years of accumulated know-how. We also design and manufacture related equipment used in accelerators and various vacuum components. Leave your vacuum needs to us.