Achieving compactness and lightweight design! A pressure transmitter for the semiconductor industry with excellent corrosion resistance and airtightness.
The "ZT11" is a pressure transmitter for the semiconductor industry that uses a vapor-deposited semiconductor strain gauge detection unit and built-in electronic circuits to convert pressure into electrical signals for transmission. By welding a highly corrosion-resistant pressure sensor made of SUS316L, it excels in corrosion resistance, airtightness, long-term stability, and reliability. Compared to previous pressure transmitters, it achieves a compact and lightweight design (compared to our products), with EP and GP grades as standard, and also offers UC grade as an option. 【Features】 ■ Achieves compact and lightweight design ■ Welded high corrosion-resistant pressure sensor made of SUS316L ■ Co-Ni alloy available as an optional feature (UC grade) ■ IP67 dustproof/waterproof rating *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications (Excerpt)】 ■Measured Fluid ・Various semiconductor process gases ■Fitting Shape ・T shape, S shape ■Connection Thread ・1/4 VCR compatible, 1/2 (3/8) VCR compatible, 1/4 UJR ■Volume ・Approximately 0.9 cm³ (for S shape: in the case of 1/4 UJR, it varies depending on the fitting shape) ■Pressure Sensor Sealing Method ・Welded type *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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The progress of computers, which can be likened to the human brain, is remarkable; however, the advancement of sensors, which can be compared to human senses, cannot be said to be on par with it. Nagano Keiki believes that the advancement of sensors is an important challenge that creates new cultures and opens our future. In the field of process instrumentation, we have gained significant achievements and trust in pressure, temperature, and measurement instruments. We are further leveraging our sensor technology and mechatronics technology in areas such as factory automation, the automotive industry, and information and communication, working on product development for "sensors," "actuators," and "control devices" that are suitable for new application fields.