Real-time measurement "Particle Counter" *Technical documentation available

This is a technical document for building a management system for large particle particles in the work environment and on-site.

The "Particle Counter" is a light scattering type microparticle meter manufactured by Airy Technology Co., Ltd., which handles products in the field of contamination control. In the operational model, it manages local and dynamic operations of the OPC alone, as well as coordinated operations with systems such as deposition machines, overseeing the process management from chamber opening to the insertion of the next lot of substrates. This document introduces various aspects related to the construction of a management system for large particle contamination, including the concepts and improvement points of these particle counters, and the increasing size of defect requirements for optical films in recent years, using diagrams and charts. [Contents] ■ The concept of particle counters (OPC) in the deposition industry to date ■ The size of defect requirements for optical films in recent years ■ The impact of contamination size on the surface within thin film layers ■ Contamination sizes on substrates calculated from required levels ■ The sizes of contamination that should be managed in thin film coatings, etc. *For more details, please refer to the PDF document or feel free to contact us.

Particle Counter