High-precision measurement of ultra-thin films and ultra-shallow ion implantation layers using a probe-driven control mechanism.
The "VR300DSE-2P" is a fully automatic four-probe measurement device that achieves high-precision measurement of the resistivity and sheet resistance of conductive samples such as silicon wafers and magnetic thin films, thanks to our core technology, the probe drive control system. We also offer models with all functions, such as the "VR300DSE," as well as tabletop models like the "VR300DE" and "VR250." 【Features】 ■ Probe drive setup possible via recipes ■ Reduced cost of ownership through high throughput ■ Supports two load ports ■ Automatic conditioning function for probe needle tips ■ Capable of creating contour maps and three-dimensional maps of resistivity distribution *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Other Features】 ■ High-precision measurement of ultra-thin films and ultra-shallow ion implantation layers using a probe drive control mechanism ■ Improved operability with a SEMI E95 compliant screen ■ Compatible with automation systems for 300mm lines *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application】 ■Materials related to silicon, polysilicon, etc. ■Ion implantation, diffusion, metal films, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Kokusai Electric Semiconductor Service Co., Ltd. (KSS) is a field service company that was separated and established in 1989 (the first year of the Heisei era) from the service division of Kokusai Electric Corporation, a world-leading electronics manufacturer. Currently, as part of the Kokusai Electric Group's mid-term management plan for the semiconductor manufacturing equipment business segment, we are engaged in the development and provision of service products that contribute to improving our customers' production efficiency and extending the life of legacy equipment in our service business area. In the electronic applications business area, we are focused on developing and providing niche top products and building a manufacturing system that earns our customers' trust. Going forward, as a member of the Kokusai Electric Group, we will continue to contribute to society as a professional group that provides reliable and satisfying services to our customers under the slogan "KSS: Kindness + Speed + Solution."