High resolution, high-speed response, space-saving! Unlimited range of motion and high responsiveness!
The "HR Series" is an ultrasonic motor (piezo motor) used to move linear and rotary stages. It has a wide variable speed range from a few μm/sec to 250 mm/sec and can be easily mounted on devices such as stages with low friction resistance. Available in various lineups, from single-element motors to motors made by stacking eight elements. Vacuum specifications are also available. 【Features】 ■ 10 nm step resolution ■ Achieves 1 nm step resolution in DC mode with AB2 amplifier ■ Wide speed range from 1 μm/s to 250 mm/s ■ Unlimited range of motion and high responsiveness ■ Excellent driving force of 4 to 32 N * For more details, please refer to the PDF materials or feel free to contact us. We also offer the "AB Driver" series, optimized for the "HR" series. Please feel free to inquire about this as well.
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【Other Features】 ■ Static holding force of 3.5 to 28N without power ■ Compatible with high vacuum up to 1.4×10^-8Pa (10^-10torr) ■ Does not generate an electromagnetic field ■ Simple structure direct drive with no rotating parts ■ HR motor allows direct movement of the stage due to direct drive ■ Mounting direction can be either vertical or horizontal *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■Medical devices, optical devices, semiconductor manufacturing equipment, etc. *For more details, please refer to the PDF document or feel free to contact us.*
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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.