Adoption of low outgassing materials, adhesives, and cables. Positioning switch specifically for high vacuum environments.
The "GN Series" is a positioning switch specifically designed for high vacuum environments, manufactured solely with low outgassing compatible components. It is being increasingly adopted by major semiconductor manufacturing equipment manufacturers for positioning applications of wafers and masks within vacuum deposition and sputtering equipment. 【Main Specifications】 ■ Contact Structure: Contact Type ■ Operating Mode: A: NO / B: NC ■ Repetition Accuracy of Operating Point: 0.003mm (range) for both ON and OFF ■ Compatible Vacuum Level / Baking Tolerance Temperature: 10-5Pa / 120℃ ■ Movement to Operation: Approximately 0.3 (A: NO) / None (B: NC) ■ Hysteresis: 0 ■ Contact Precision Life: 3 million cycles ■ Stroke: 1.5mm ■ Contact Force: 0.5N ■ Contact Rating: DC5V to DC24V, steady current below 10mA (inrush current below 20mA) *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■GN-PT5M3A ■GN-PT5M3B ■GN-PT5M3A-R ■GN-PT5M3B-R *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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In the industrial sensor industry, where electric sensors are the norm, we have developed a "precision mechanical sensor" that has no equivalent in the world. It demonstrates high accuracy even in harsh environments where coolant and chips are scattered, holding over 50 domestic and international patents with high originality. In the machine tool industry, it is adopted as a "tool setter" that detects tool wear, being used by more than 70 machine tool manufacturers across 17 countries worldwide, achieving a top-class share globally.