Exploring optimal conditions! Introducing examples of utilizing multi-dimensional display charts!
We will introduce a case study of exploring optimal conditions for the etching process, coupled with the detailed chemical reaction analysis program CHEMKIN. In the problem setup, we varied the raw gas supply amount (SCCM) and oxygen concentration, aiming to find the operating point where the outlet C2F6 concentration and CF4 concentration are minimized, while maximizing the etching rate (minimizing the film formation rate). As a result of the calculations, it became clear that there is a trade-off relationship between C2F6 concentration and etching rate. Subsequently, we successfully extracted preferred solutions from the multidimensional display chart of "modeFRONTIER." [Case Study] - Software Used: modeFRONTIER, CHEMKIN - Objective: Exploration of optimal conditions for the etching process - Effect: Comparison of preferred solutions using multidimensional display charts *For more details, please refer to the external link or feel free to contact us.*
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Features of the Multi-Objective Robust Design Optimization Support Tool "modeFRONTIER": - Equipped with advanced optimization methods, experimental design methods, and response surface approximation methods. - Supports multi-objective robust design optimization and multi-objective tolerance design optimization. - Includes a variety of post-processing functions such as statistical analysis, multivariate analysis, and CAP. - Interface compatible with Japanese (Windows) and English environments. - Standard dedicated nodes for direct access to various tools (such as CATIA V5, ANSYS Workbench, MATLAB, LabVIEW, etc.). *For more details, please refer to the external link or feel free to contact us.
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For more details, please refer to the external link or feel free to contact us.
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While focusing on MBD and CAE technologies and their surrounding technical areas, we specialize in building virtual products and collaborative design processes through cutting-edge digital engineering. We have formed partnerships with leading software vendors of the era to provide top-level digital engineering technologies in Japan, including solutions for thermal fluid analysis, structural analysis, electromagnetic field analysis, acoustic analysis, system simulation, optimization technologies, embedded software development environments, and simulation process data management (SPDM) solutions. We offer a comprehensive engineering environment necessary to solve the diverse and complex challenges faced by our customers. Official Blog: https://www.idaj.co.jp/blog/ IDAJ YouTube Channel: https://www.youtube.com/channel/UCGCd8pB5Lwq_noIoxpgJrrw/featured X: https://twitter.com/IDAJ_CAE Facebook: https://www.facebook.com/IDAJ.CAE
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